Silicon Carbide Ceramic Arms and End Effectors
Silicon Carbide Ceramic Component
SKU: FWM/SC-ARM-001
- Material
- Silicon Carbide (SiC)
- Size
- Custom sizes available
- MOQ
- 5 pieces per type
- Applications
- Semiconductor
Silicon Carbide Ceramic Arms (also known as SiC ceramic end effectors or handling arms) are precision components designed for wafer transfer and positioning in semiconductor manufacturing equipment.
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Product Description
Silicon carbide ceramic arms are end effectors that support, transfer and position wafers in semiconductor equipment.
Their fork, contact-pad and mounting geometry connects the wafer to the handling robot. Silicon carbide's stiffness, wear resistance and low thermal expansion help maintain the contact geometry during repeated transfer and temperature changes.
Product Features
- High stiffness-to-weight ratio for stable positioning
- Low thermal expansion to limit dimensional change
- Wear-resistant contact surfaces
- Chemical resistance matched to the process medium
- Contact and mounting geometry defined for the handling system
Typical Applications
- Wafer transfer between semiconductor process stations
- Wafer loading, unloading and positioning
- Ceramic end effectors for precision handling robots
Dense SiC Typical Properties
| Property | SSiC — sintered | SiSiC / RBSiC — reaction bonded | Condition |
|---|---|---|---|
| Density (g/cm³) | ≥3.12 | ≥3.03 | — |
| Apparent porosity (%) | <0.2 | <0.2 | — |
| Vickers hardness (HV0.5) | 2100 | 2000 | 0.5 kgf test force |
| Young’s modulus (GPa) | 400 | 350 | — |
| Fracture toughness (MPa·m¹/²) | 4–5 | 2.5–3.5 | — |
| Flexural strength (MPa) | ≥400 | ≥350 | 25°C |
| Compressive strength (MPa) | ≥2200 | ≥2000 | 25°C |
| Thermal conductivity (W/(m·K)) | ≥110 | ≥90 | 25°C |
| Mean linear thermal expansion coefficient (10⁻⁶/K) | 4.0 | 4.0 | 25–1000°C |
| Typical maximum material temperature (°C) | 1650 | 1300 | — |
Available Forms
Representative forms are shown for selection. Send drawing, dimensions, operating conditions and quantity for confirmation before quotation.
- Drawing-based end effectors and handling arms evaluated for feasibility.
Packaging & Shipping
Packing and shipment arrangements are selected for the confirmed component geometry and order requirements.
| Item | Details |
|---|---|
| Packaging & shipping | Individually protected, cushioned packaging in export cartons or wooden cases. Port confirmed in quotation. |
| Payment terms | T/T / Western Union / PayPal; 50% advance payment, 50% balance before shipment |
| Shipping methods | Sea freight / Air freight / Door-to-door courier |
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