Silicon Carbide Ceramic Arms
Silicon Carbide Ceramic Component
SKU: FWM/SC-ARM-001
Product Configuration
Conceptual geometry guide; final configuration follows the approved drawing.
Handling Arm
Representative form for drawing review.
Custom Interface
Alternative geometry for application review.
- Material
- Silicon Carbide (SiC)
- Size
- Custom sizes available
- MOQ
- 5 pieces per type
- Applications
- Semiconductor
Silicon Carbide Ceramic Arms (also known as SiC ceramic end effectors or handling arms) are precision components designed for wafer transfer and positioning in semiconductor manufacturing equipment.
Send drawing, dimensions, operating conditions and quantity for confirmation before quotation.
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Product Description
Review representative product forms and application context below. Final geometry and acceptance criteria are confirmed from the drawing and operating conditions.
Silicon Carbide Ceramic Arms (also known as SiC ceramic end effectors or handling arms) are precision components designed for wafer transfer and positioning in semiconductor manufacturing equipment.
Made from high-purity silicon carbide ceramics, these arms offer high rigidity, excellent thermal stability, low particle generation and superior resistance to corrosive process environments. They serve as the critical “hand” of wafer handling robots for contamination-free wafer transfer.
Manufacturing process (source record): High-purity SiC powder → forming → sintering → precision diamond machining and polishing → final inspection.
Quality control (source record): Dimensional inspection, surface quality check, cleanliness verification and batch traceability.
Data status: the source record is not supplier-verified. Numerical values are typical engineering references, not guaranteed product specifications; final values require grade, drawing and test-basis confirmation.
Product Features
- High stiffness-to-weight ratio for precise positioning
- Excellent thermal stability and low thermal expansion
- Superior chemical resistance to process gases and chemicals
- Extremely low particle generation and non-contaminating surface
- Compatible with cleanroom and ultra-high vacuum environments
- Optional surface treatments (e.g. DLC coating)
Typical Applications
- Wafer loading/unloading in CVD, PVD, etch and implantation systems
- High-temperature processes (epitaxial growth, diffusion, annealing)
- Vacuum and ultra-clean environments in semiconductor production
- Precision handling of 200 mm / 300 mm wafers
Technical Data
| Property | Unit | SSiC | RBSiC | RSiC |
|---|---|---|---|---|
| Color | — | Black / dark gray | Black / dark gray | Black / dark gray |
| Bulk density | g/cm³ | ≥ 3.10 | ≥ 3.03 | 2.65 – 2.80 |
| Open porosity | % | < 0.2 | < 0.2 | < 16 |
| Hardness | HV0.5 | Approx. 2100 – 2600 | Approx. 2000 | Approx. 1800 – 2200 |
| Elastic modulus | GPa | Approx. 400 | Approx. 350 | Approx. 250 – 300 |
| Flexural strength at 25°C | MPa | ≥ 400 | ≥ 350 | 100 – 200 |
| Compressive strength at 25°C | MPa | ≥ 2200 | ≥ 2000 | ≥ 1500 |
| Thermal conductivity at 25°C | W/(m·K) | ≥ 110 | ≥ 90 | 80 – 120 |
| Coefficient of thermal expansion | 10⁻⁶/K | Approx. 4.0 | Approx. 4.0 | Approx. 4.0 – 4.5 |
| Maximum service temperature | °C | Up to 1650 | Up to 1300 – 1400 | Up to 1600 – 1650 |
Typical reference values for material selection only. Final specifications are confirmed against drawing, grade and operating conditions. Values are typical reference data. Final specifications confirmed against drawing and operating conditions.
Available Forms
Representative forms are shown for selection. Send drawing, dimensions, operating conditions and quantity for confirmation before quotation.
- Drawing-based end effectors and handling arms evaluated for feasibility.
Packaging & Shipping
Packing and shipment arrangements are selected for the confirmed component geometry and order requirements.
| Item | Details |
|---|---|
| Packaging & shipping | Individually protected, cushioned packaging in export cartons or wooden cases. Payment terms, port and shipping options confirmed in quotation. |
About FreeWill Material
FreeWill Material supplies technical ceramic components for demanding industrial applications. Our product range includes silicon carbide, silicon nitride, alumina, zirconia and other engineered ceramic materials.
We work with qualified manufacturing resources in China to support material selection, drawing-based customization, production coordination, inspection documentation and export delivery. Component feasibility, tolerances and material grades are reviewed according to the customer's drawings and operating conditions.
Our focus is to provide international buyers with clear technical communication, practical sourcing support and responsive quotation service for custom ceramic components.
- Drawing-Based Customization
- Material Selection Support
- Inspection Documentation
- Export Coordination
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