Silicon Carbide Vacuum Chucks
Silicon Carbide Ceramic Component
SKU: FWM/SC-CHUCK-001
- Material
- Silicon Carbide (SiC)
- Size
- Custom sizes available
- MOQ
- 5 pieces per type
- Applications
- Semiconductor & Microelectronics
Silicon carbide vacuum chucks for precision workholding and transfer, with application-specific contact surfaces, vacuum passages and mounting interfaces.
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Product Description
Silicon carbide vacuum chucks hold and position workpieces using a pressure difference across a defined contact surface.
Vacuum passages connect the working surface to the vacuum supply. The contact pattern supports the workpiece while leaving the required process area accessible. This is vacuum workholding, not electrostatic chucking.
Silicon carbide's stiffness, wear resistance and low thermal expansion help maintain a stable working surface. Its thermal conductivity is useful where heat must be spread through the chuck body.
Product Features
- High stiffness for a stable workholding surface
- Low thermal expansion to limit thermal movement
- Hard surfaces for wear-resistant workpiece contact
- Thermal conductivity to distribute heat through the chuck
- Contact patterns, vacuum passages and mounting interfaces matched to the equipment
Typical Applications
- Vacuum workholding during wafer inspection and processing
- Precision positioning of flat workpieces
- Vacuum-assisted transfer in electronics equipment
- Custom ceramic chuck bodies for compatible process environments
Dense SiC Typical Properties
| Property | SSiC — sintered | SiSiC / RBSiC — reaction bonded | Condition |
|---|---|---|---|
| Density (g/cm³) | ≥3.12 | ≥3.03 | — |
| Apparent porosity (%) | <0.2 | <0.2 | — |
| Vickers hardness (HV0.5) | 2100 | 2000 | 0.5 kgf test force |
| Young’s modulus (GPa) | 400 | 350 | — |
| Fracture toughness (MPa·m¹/²) | 4–5 | 2.5–3.5 | — |
| Flexural strength (MPa) | ≥400 | ≥350 | 25°C |
| Compressive strength (MPa) | ≥2200 | ≥2000 | 25°C |
| Thermal conductivity (W/(m·K)) | ≥110 | ≥90 | 25°C |
| Mean linear thermal expansion coefficient (10⁻⁶/K) | 4.0 | 4.0 | 25–1000°C |
| Typical maximum material temperature (°C) | 1650 | 1300 | — |
Available Forms
Representative forms are shown for selection. Customizable vacuum port and bespoke interfaces. Send drawing, dimensions, operating temperature/pressure and quantity for confirmation before quotation.
- Standard and custom vacuum suction cups
- Custom vacuum ports and mounting interfaces
Packaging & Shipping
Packing and shipment arrangements are selected for the confirmed component geometry and order requirements.
| Item | Details |
|---|---|
| Packaging & shipping | Individually protected, cushioned and packed in export cartons or wooden cases according to size, quantity and transport requirements. Port of shipment confirmed in the quotation. |
| Payment terms | T/T / Western Union / PayPal; 50% advance payment, 50% balance before shipment |
| Shipping methods | Sea freight / Air freight / Door-to-door courier |
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